Institution:
Rice University
Keywords:
ALE,
aluminum,
bipolar transistor,
CNT,
copper,
CVD,
deposition,
diffusion,
diode,
dopant,
drain,
electronic materials,
environment,
epitaxy,
fluoride,
fluorine,
gallium arsenide,
gate,
graphene,
growth,
insulator,
laser,
LED,
light,
MBE,
metal,
MOCVD,
MOS,
MOSFET,
nano,
nanoparticle,
nitride,
nitrogen,
orecursor,
oxide,
oxygen,
photolithography,
RBS,
semiconductor,
silica,
silicon,
solar cell,
source,
thin film,
transistor,
VSI,
well
Summary:
An overview of the processes for the fabrication of electronic and optoelectronic devices from a chemistry perspective.
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