Keywords: absorption, Ar, argon, Arrhenius, chamber, gas, infrared, interaction, ionic pump, isotherm, Langmuir, manipulator, mass spectrometer, non-evaporate pump, plasma, quadrupole, reaction order, reflection, reflection absorption infrared spectrometer (RAIRS), solid, spectrometer, sputtering, surface chemistry, temperature programmed desorption (TPD), titanium sublimation pump, TPD-MS, TPD theory, turbomolecular pump, UHV, ultra-high vacuum

Summary: TPD technique used to determine activation parameters for gas-solid interaction.