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CMOS & MEMS Integration (m11820)
Keywords: CMOS MEMS, IMEMS, MEMS, MEMS first, MEMS last, post-CMOS, pre-CMOS
Summary: Micro Electro Mechanical Systems has roots dating back to the early days of the IC industry. It is a logical extension of the silicon processes used to fabricate integrated circuits. These processes, which were originally developed to build microelectronic devices, are also capable of building micromechanical devices having structures capable ... moveable elements.
Subject: Science and Technology
Language: English
Popularity: 50.54%
Revised: 2004-02-11
Revisions: New
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