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About: Integrated Circuit Manufacturing: Bird's Eye View

Module by: Bill Wilson

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Name: Integrated Circuit Manufacturing: Bird's Eye View
ID: m11370
Language: English (en)
Summary: This document provides a bird's eye view of Integrated Circuit manufacturing. It steps through the process of manufacturing an IC, from the n-tank to patterning the metallization.
Subject: Science and Technology
Keywords: circuit, field, FOX, integrated, manufacturing, metallization, n-tank, oxide
Document Type: -//CNX//DTD CNXML 0.5 plus MathML//EN
License: Creative Commons Attribution License (CC-BY 1.0)
Authors: Bill Wilson (wlw@madriver.net)
Copyright Holders: Bill Wilson (wlw@madriver.net)
Maintainers: Elizabeth Gregory (elizabeth.gregory@gmail.com), Bill Wilson (wlw@madriver.net), Jeffrey Silverman (JSilverman@astro.berkeley.edu)
Version: 1.2 (history)
Created: Jun 20, 2003 12:00 am GMT-5
Revised: Jun 23, 2003 12:00 am GMT-5

Version History

Version: 1.2 Jun 23, 2003 12:00 am GMT-5 by Jeffrey Silverman
Changes: 
Fixed 2 connexions.
Version: 1.1 Jun 20, 2003 12:00 am GMT-5 by Elizabeth Gregory
Changes: 
First Version

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The following citation styles comply with the attribution requirements for the license (CC-BY 1.0) of this work:

American Chemical Society (ACS) Style Guide:

Wilson, B. Integrated Circuit Manufacturing: Bird's Eye View, Connexions Web site. http://cnx.org/content/m11370/1.2/, Jun 23, 2003.

American Medical Assocation (AMA) Manual of Style:

Wilson B. Integrated Circuit Manufacturing: Bird's Eye View [Connexions Web site]. June 23, 2003. Available at: http://cnx.org/content/m11370/1.2/.

American Psychological Assocation (APA) Publication Manual:

Wilson, B. (2003, June 23). Integrated Circuit Manufacturing: Bird's Eye View. Retrieved from the Connexions Web site: http://cnx.org/content/m11370/1.2/

Chicago Manual of Style (Bibliography):

Wilson, Bill. "Integrated Circuit Manufacturing: Bird's Eye View." Connexions. June 23, 2003. http://cnx.org/content/m11370/1.2/.

Chicago Manual of Style (Note):

Bill Wilson, "Integrated Circuit Manufacturing: Bird's Eye View," Connexions, June 23, 2003, http://cnx.org/content/m11370/1.2/.

Chicago Manual of Style (Reference, in Author-Date style):

Wilson, B. 2003. Integrated Circuit Manufacturing: Bird's Eye View. Connexions, June 23, 2003. http://cnx.org/content/m11370/1.2/.

Modern Languages Association (MLA) Style Manual:

Wilson, Bill. Integrated Circuit Manufacturing: Bird's Eye View. Connexions. 23 June 2003 <http://cnx.org/content/m11370/1.2/>.