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Module by: Jatinder Singh. E-mail the author

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Name: CMOS & MEMS Integration
ID: m11820
Language: English (en)
Summary: Micro Electro Mechanical Systems has roots dating back to the early days of the IC industry. It is a logical extension of the silicon processes used to fabricate integrated circuits. These processes, which were originally developed to build microelectronic devices, are also capable of building micromechanical devices having structures capable of motion in a microscopic scale. MEMS devices are built in much the same way as a silicon integrated circuit. Various films such as polysilicon, silicon nitride, silicon dioxide, aluminum and gold are deposited and patterned to produce complicated, multilayer three-dimensional structures. However, the major difference is the release step at the end. In a MEMS device, some of the layer materials are removed using a selective etch, leaving a device with moveable elements.
Subject: Science and Technology
Keywords: CMOS MEMS, IMEMS, MEMS, MEMS first, MEMS last, post-CMOS, pre-CMOS
Document Type: -//CNX//DTD CNXML 0.5 plus MathML//EN
License: Creative Commons Attribution License CC-BY 1.0
Authors: Jatinder Singh (jeetu@mems.ece.iisc.ernet.in)
Copyright Holders: Jatinder Singh (jeetu@mems.ece.iisc.ernet.in)
Maintainers: Jatinder Singh (jeetu@mems.ece.iisc.ernet.in)
Latest version: 1.1 (history)
First publication date: Feb 11, 2004 10:30 pm US/Central
Last revision to module: Feb 11, 2004 11:26 pm US/Central
Module XML: m11820_1.1.cnxml

Version History

Version: 1.1 Feb 11, 2004 11:26 pm US/Central by Jatinder Singh
Changes: 
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Singh, J. CMOS & MEMS Integration, Connexions Web site. http://cnx.org/content/m11820/1.1/, Feb 11, 2004.

American Medical Assocation (AMA) Manual of Style:

Singh J. CMOS & MEMS Integration [Connexions Web site]. February 11, 2004. Available at: http://cnx.org/content/m11820/1.1/.

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Singh, J. (2004, February 11). CMOS & MEMS Integration. Retrieved from the Connexions Web site: http://cnx.org/content/m11820/1.1/

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Singh, Jatinder. "CMOS & MEMS Integration." Connexions. February 11, 2004. http://cnx.org/content/m11820/1.1/.

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Jatinder Singh, "CMOS & MEMS Integration," Connexions, February 11, 2004, http://cnx.org/content/m11820/1.1/.

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Singh, J. 2004. CMOS & MEMS Integration. Connexions, February 11, 2004. http://cnx.org/content/m11820/1.1/.

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Singh, Jatinder. CMOS & MEMS Integration. Connexions. 11 Feb. 2004 <http://cnx.org/content/m11820/1.1/>.