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Module by: Jatinder Singh

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Name: CMOS & MEMS Integration
ID: m11820
Language: English (en)
Summary: Micro Electro Mechanical Systems has roots dating back to the early days of the IC industry. It is a logical extension of the silicon processes used to fabricate integrated circuits. These processes, which were originally developed to build microelectronic devices, are also capable of building micromechanical devices having structures capable of motion in a microscopic scale. MEMS devices are built in much the same way as a silicon integrated circuit. Various films such as polysilicon, silicon nitride, silicon dioxide, aluminum and gold are deposited and patterned to produce complicated, multilayer three-dimensional structures. However, the major difference is the release step at the end. In a MEMS device, some of the layer materials are removed using a selective etch, leaving a device with moveable elements.
Subject: Science and Technology
Keywords: CMOS MEMS, IMEMS, MEMS, MEMS first, MEMS last, post-CMOS, pre-CMOS
Document Type: -//CNX//DTD CNXML 0.5 plus MathML//EN
License: Creative Commons Attribution License (CC-BY 1.0)
Authors: Jatinder Singh (jeetu@mems.ece.iisc.ernet.in)
Copyright Holders: Jatinder Singh (jeetu@mems.ece.iisc.ernet.in)
Maintainers: Jatinder Singh (jeetu@mems.ece.iisc.ernet.in)
Version: 1.1 (history)
Created: Feb 11, 2004 10:30 pm US/Central
Revised: Feb 11, 2004 11:26 pm US/Central

Version History

Version: 1.1 Feb 11, 2004 11:26 pm US/Central by Jatinder Singh
Changes: 
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American Chemical Society (ACS) Style Guide:

Singh, J. CMOS & MEMS Integration, Connexions Web site. http://cnx.org/content/m11820/1.1/, Feb 11, 2004.

American Medical Assocation (AMA) Manual of Style:

Singh J. CMOS & MEMS Integration [Connexions Web site]. February 11, 2004. Available at: http://cnx.org/content/m11820/1.1/.

American Psychological Assocation (APA) Publication Manual:

Singh, J. (2004, February 11). CMOS & MEMS Integration. Retrieved from the Connexions Web site: http://cnx.org/content/m11820/1.1/

Chicago Manual of Style (Bibliography):

Singh, Jatinder. "CMOS & MEMS Integration." Connexions. February 11, 2004. http://cnx.org/content/m11820/1.1/.

Chicago Manual of Style (Note):

Jatinder Singh, "CMOS & MEMS Integration," Connexions, February 11, 2004, http://cnx.org/content/m11820/1.1/.

Chicago Manual of Style (Reference, in Author-Date style):

Singh, J. 2004. CMOS & MEMS Integration. Connexions, February 11, 2004. http://cnx.org/content/m11820/1.1/.

Modern Languages Association (MLA) Style Manual:

Singh, Jatinder. CMOS & MEMS Integration. Connexions. 11 Feb. 2004 <http://cnx.org/content/m11820/1.1/>.