| Name: | Formation of Silicon and Gallium Arsenide Wafers |
| ID: | m16627 |
| Language: | English (en) |
| Summary: | |
| Subject: | Science and Technology |
| Keywords: | acetic acid, acid, alkaline, anisotropic, annular, Caro's acid, chlorate, citric acid, cleaning, cropping, crystal shaping, Czochralski, diamond, etch, etching, GaAs, gallium arsenide, grinding, HF, HNO3, hydrofluoric acid, hydrogen peroxide, lapping, nitric acid, nitrogen, n-type, polishing, potassium hydroxide, p-type, rate limiting step, semiconductor, si, silicon, sodium hydroxide, surface, wafer, wafering |
| License: | Creative Commons Attribution License CC-BY 2.0 |
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| Authors: | Andrew R. Barron (arb@rice.edu) |
| Copyright Holders: | Andrew R. Barron (arb@rice.edu) |
| Maintainers: | Andrew R. Barron (arb@rice.edu) |
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| Latest version: | 1.3 (history) |
| First publication date: | Jun 9, 2008 4:14 pm GMT-5 |
| Last revision to module: | Jul 13, 2009 3:38 pm GMT-5 |
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| Module XML: | m16627_1.3.cnxml |
| Version: | 1.3 Jul 13, 2009 3:38 pm GMT-5 by Andrew R. Barron |
| Changes: | update meta data |
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| Version: | 1.2 Jul 5, 2009 1:46 pm GMT-5 by Andrew R. Barron |
| Changes: | change format for equations and resize figs |
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| Version: | 1.1 Jun 16, 2008 11:14 am GMT-5 by Andrew R. Barron |
| Changes: | new |
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Barron, A. Formation of Silicon and Gallium Arsenide Wafers, Connexions Web site. http://cnx.org/content/m16627/1.3/, Jul 13, 2009.
Barron A. Formation of Silicon and Gallium Arsenide Wafers [Connexions Web site]. July 13, 2009. Available at: http://cnx.org/content/m16627/1.3/.
Barron, A. (2009, July 13). Formation of Silicon and Gallium Arsenide Wafers. Retrieved from the Connexions Web site: http://cnx.org/content/m16627/1.3/
Barron, Andrew. "Formation of Silicon and Gallium Arsenide Wafers." Connexions. July 13, 2009. http://cnx.org/content/m16627/1.3/.
Andrew Barron, "Formation of Silicon and Gallium Arsenide Wafers," Connexions, July 13, 2009, http://cnx.org/content/m16627/1.3/.
Barron, A. 2009. Formation of Silicon and Gallium Arsenide Wafers. Connexions, July 13, 2009. http://cnx.org/content/m16627/1.3/.
Barron, Andrew. Formation of Silicon and Gallium Arsenide Wafers. Connexions. 13 July 2009 <http://cnx.org/content/m16627/1.3/>.