Optical interferometry allows us to make extremely accurate measurements and has been used as a laboratory technique for almost a hundred years. Thomas Young observed interference of light and measured the wavelength of light in an experiment, performed around 1801. This experiment gave an evidence of Young's arguments for the wave model for light. The discovery of interference gave a basis to development of interferomertry techniques widely successfully used as in microscopic investigations, as in astronomic investigations.
The physical principles of optical interferometry exploit the wave properties of light. Light can be thought as electromagnetic wave propagating through space. If we assume that we are dealing with a linearly polarized wave propagating in a vacuum in z direction, electric field E can be represented by a sinusoidal function of distance and time.
E
(
x
,
y
,
z
,
t
)
=
a
cos
2π
(
vt
−
z
/
λ
)
E
(
x
,
y
,
z
,
t
)
=
a
cos
2π
(
vt
−
z
/
λ
)
size 12{E \( x,y,z,t \) =a"cos" left [2π \( ital "vt" - z/λ \) right ]} {}
(1)Where a is the amplitude of the light wave, v is the frequency, and λ is its wavelength. The term within the square brackets is called the phase of the wave. Let’s rewrite this equation in more compact form,
E
(
x
,
y
,
z
,
t
)
=
a
cos
⌈
ωt
−
kz
⌉
E
(
x
,
y
,
z
,
t
)
=
a
cos
⌈
ωt
−
kz
⌉
size 12{E \( x,y,z,t \) =a"cos" lceil ωt - ital "kz" rceil } {}
(2)where
ω=2πvω=2πv size 12{ω=2πv} {} is the circular frequency, and
k=2π/λk=2π/λ size 12{k=2π/λ} {} is the propagation constant. Let’s also transform this second equation into a complex exponential form,
E
(
x
,
y
,
z
,
t
)
=
Re
a
exp
(
iϕ
)
exp
(
iωt
)
=
Re
A
exp
(
iωt
)
E
(
x
,
y
,
z
,
t
)
=
Re
a
exp
(
iϕ
)
exp
(
iωt
)
=
Re
A
exp
(
iωt
)
size 12{E \( x,y,z,t \) ="Re" left lbrace a"exp" \( iϕ \) "exp" \( iωt \) right rbrace ="Re" left lbrace A"exp" \( iωt \) right rbrace } {}
(3)where
ϕ=2πz/λϕ=2πz/λ size 12{ϕ=2πz/λ} {} and
A=exp(−iϕ)A=exp(−iϕ) size 12{A="exp" \( - iϕ \) } {} is known as the complex amplitude. If n is a refractive index of a medium where the light propagates, the light wave traverses a distance d in such a medium. The equivalent optical path in this case is
p
=
n
⋅
d
p
=
n
⋅
d
size 12{p=n cdot d} {}
(4)When two light waves are superposed, the result intensity at any point depends on whether reinforce or cancel each other (Figure 1). This is well known phenomenon of interference. We will assume that two waves are propagating in the same direction and are polarized with their field vectors in the same plane. We will also assume that they have the same frequency. The complex amplitude at any point in the interference pattern is then the sum of the complex amplitudes of the two waves, so that we can write,
A
=
A
1
+
A
2
A
=
A
1
+
A
2
size 12{A=A rSub { size 8{1} } +A rSub { size 8{2} } } {}
(5)where
A1=a1exp(−iϕ1)A1=a1exp(−iϕ1) size 12{A rSub { size 8{1} } =a rSub { size 8{1} } "exp" \( - iϕ rSub { size 8{1} } \) } {} and
A2=a2exp(−iϕ2)A2=a2exp(−iϕ2) size 12{A rSub { size 8{2} } =a rSub { size 8{2} } "exp" \( - iϕ rSub { size 8{2} } \) } {} are the complex amplitudes of two waves. The resultant intensity is, therefore,
I
=
∣
A
∣
2
=
I
1
+
I
2
+
2
(
I
1
I
2
)
1
/
2
cos
Δϕ
I
=
∣
A
∣
2
=
I
1
+
I
2
+
2
(
I
1
I
2
)
1
/
2
cos
Δϕ
size 12{I= lline A rline rSup { size 8{2} } =I rSub { size 8{1} } +I rSub { size 8{2} } +2 \( I rSub { size 8{1} } I rSub { size 8{2} } \) rSup { size 8{1/2} } "cos"Δϕ} {}
(6)where I1I1 size 12{I rSub { size 8{1} } } {} and I2I2 size 12{I rSub { size 8{2} } } {} are the intensities of two waves acting separately, and
Δϕ=ϕ1−ϕ2Δϕ=ϕ1−ϕ2 size 12{Δϕ=ϕ rSub { size 8{1} } - ϕ rSub { size 8{2} } } {} is the phase difference between them. If the two waves are derived from a common source, the phase difference corresponds to an optical path difference,
Δp
=
(
λ
/
2π
)
Δϕ
Δp
=
(
λ
/
2π
)
Δϕ
size 12{Δp= \( λ/2π \) Δϕ} {}
(7)If
ΔϕΔϕ size 12{Δϕ} {}, the phase difference between the beams, varies linearly across the field of view, the intensity varies cosinusoidally, giving rise to alternating light and dark bands or fringes (Figure 1). The intensity in an interference pattern has its maximum value
I
max
=
I
1
+
I
2
+
2
(
I
1
I
2
)
1
/
2
I
max
=
I
1
+
I
2
+
2
(
I
1
I
2
)
1
/
2
size 12{I rSub { size 8{"max"} } =I rSub { size 8{1} } +I rSub { size 8{2} } +2 \( I rSub { size 8{1} } I rSub { size 8{2} } \) rSup { size 8{1/2} } } {}
(8)when
Δϕ=2mπΔϕ=2mπ size 12{Δϕ=2mπ} {}, where m is an integer and its minimum value
I
min
=
I
1
+
I
2
−
2
(
I
1
I
2
)
1
/
2
I
min
=
I
1
+
I
2
−
2
(
I
1
I
2
)
1
/
2
size 12{I rSub { size 8{"min"} } =I rSub { size 8{1} } +I rSub { size 8{2} } - 2 \( I rSub { size 8{1} } I rSub { size 8{2} } \) rSup { size 8{1/2} } } {}
(9)when
Δϕ=(2m+1)πΔϕ=(2m+1)π size 12{Δϕ= \( 2m+1 \) π} {}.
The principle of interferometry is widely used to develop many types of interferometric set ups. One of the earliest set ups is Michelson interferometry. The idea of this interferometry is quite simple: interference fringes are produced by splitting a beam of monochromatic light so that one beam strikes a fixed mirror and the other a movable mirror. An interference pattern results when the reflected beams are brought back together. The Michelson interferometric scheme is shown in Figure 2.
The difference of path lengths between two beams is 2x because beams traverse the designated distances twice. The interference occurs when the path difference is equal to integer numbers of wavelengths,
Δp
=
2x
=
mλ
,
m
=
0,
±
1,
±
2
.
.
.
Δp
=
2x
=
mλ
,
m
=
0,
±
1,
±
2
.
.
.
size 12{Δp=2x=mλ,m=0, +- 1, +- 2 "." "." "." } {}
(10)Modern interferometric systems are more complicated. Using special phase-measurement techniques they capable to perform much more accurate height measurements than can be obtained just by directly looking at the interference fringes and measuring how they depart from being straight and equally spaced. Typically interferometric system consist of lights source, beamsplitter, objective system, system of registration of signals and transformation into digital format and computer which process data. Vertical scanning interferometry is contains all these parts. Figure 3 shows a configuration of VSI interferometric system.
Many of modern interferometric systems use Mirau objective in their constructions. Mireau objective is based on a Michelson interferometer. This objective consists of a lens, a reference mirror and a beamsplitter. The idea of getting interfering beams is simple: two beams (red lines) travel along the optical axis. Then they are reflected from the reference surface and the sample surface respectively (blue lines). After this these beams are recombined to interfere with each other. An illumination or light source system is used to direct light onto a sample surface through a cube beam splitter and the Mireau objective. The sample surface within the field of view of the objective is uniformly illuminated by those beams with different incidence angles. Any point on the sample surface can reflect those incident beams in the form of divergent cone. Similarly, the point on the reference symmetrical with that on the sample surface also reflects those illuminated beams in the same form.
The Mireau objective directs the beams reflected of the reference and the sample surface onto a CCD (charge-coupled device) sensor through a tube lens. The CCD sensor is an analog shift register that enables the transportation of analog signals (electric charges) through successive stages (capacitors), controlled by a clock signal. The resulting interference fringe pattern is detected by CCD sensor and the corresponding signal is digitized by a frame grabber for further processing with a computer.
The distance between a minimum and a maximum of the interferogram produced by two beams reflected from the reference and sample surface is known. That is, exactly half the wavelength of the light source. Therefore, with a simple interferogram the vertical resolution of the technique would be also limited to λ/2. If we will use a laser light as a light source with a wavelength of 300 nm the resolution would be only 150 nm. This resolution is not good enough for a detailed near-atomic scale investigation of crystal surfaces. Fortunately, the vertical resolution of the technique can be improved significantly by moving either the reference or the sample by a fraction of the wavelength of the light. In this way, several interferograms are produced. Then they are all overlayed, and their phase shifts compared by the computer software Figure 4. This method is widely known as phase shift interferometry (PSI).
Most optical testing interferometers now use phase-shifting techniques not only because of high resolution but also because phase-shifting is a high accuracy rapid way of getting the interferogram information into the computer. Also usage of this technique makes the inherent noise in the data taking process very low. As the result in a good environment angstrom or sub-angstrom surface height measurements can be performed. As it was said above, in phase-shifting interferometry the phase difference between the interfering beams is changed at a constant rate as the detector is read out. Once the phase is determined across the interference field, the corresponding height distribution on the sample surface can be determined. The phase distribution φ(x, y) is recorded by using the CCD camera.
Let’s assign A(x, y), B(x, y), C(x, y) and D(x, y) to the resulting interference light intensities which are corresponded to phase-shifting steps of 0, π/2, π and 3π/2. These intensities can be obtained by moving the reference mirror through displacements of λ/8, λ/4 and 3λ/8, respectively. The equations for the resulting intensities would be:
A
(
x
,
y
)
=
I
1
(
x
,
y
)
+
I
2
(
x
,
y
)
cos
α
(
x
,
y
)
A
(
x
,
y
)
=
I
1
(
x
,
y
)
+
I
2
(
x
,
y
)
cos
α
(
x
,
y
)
size 12{A \( x,y \) =I rSub { size 8{1} } \( x,y \) +I rSub { size 8{2} } \( x,y \) "cos"α \( x,y \) } {}
(11)
B
(
x
,
y
)
=
I
1
(
x
,
y
)
−
I
2
(
x
,
y
)
sin
α
(
x
,
y
)
B
(
x
,
y
)
=
I
1
(
x
,
y
)
−
I
2
(
x
,
y
)
sin
α
(
x
,
y
)
size 12{B \( x,y \) =I rSub { size 8{1} } \( x,y \) - I rSub { size 8{2} } \( x,y \) "sin"α \( x,y \) } {}
(12)
C
(
x
,
y
)
=
I
1
(
x
,
y
)
−
I
2
(
x
,
y
)
cos
α
(
x
,
y
)
C
(
x
,
y
)
=
I
1
(
x
,
y
)
−
I
2
(
x
,
y
)
cos
α
(
x
,
y
)
size 12{C \( x,y \) =I rSub { size 8{1} } \( x,y \) - I rSub { size 8{2} } \( x,y \) "cos"α \( x,y \) } {}
(13)
D
(
x
,
y
)
=
I
1
(
x
,
y
)
+
I
2
(
x
,
y
)
sin
α
(
x
,
y
)
D
(
x
,
y
)
=
I
1
(
x
,
y
)
+
I
2
(
x
,
y
)
sin
α
(
x
,
y
)
size 12{D \( x,y \) =I rSub { size 8{1} } \( x,y \) +I rSub { size 8{2} } \( x,y \) "sin"α \( x,y \) } {}
(14)where
I1x,yI1x,y size 12{I rSub { size 8{1} } left (x,y right )} {}and
I2x,yI2x,y size 12{I rSub { size 8{2} } left (x,y right )} {} are two overlapping beams from two symmetric points on the test surface and the reference respectively. Solving equations Equation 11–Equation 14, the phase map φ(x, y) of a sample surface will be given by the relation:
ϕ
x
,
y
=
B
x
,
y
−
D
x
,
y
A
x
,
y
−
C
x
,
y
ϕ
x
,
y
=
B
x
,
y
−
D
x
,
y
A
x
,
y
−
C
x
,
y
size 12{ϕ left (x,y right )= { {B left (x,y right ) - D left (x,y right )} over {A left (x,y right ) - C left (x,y right )} } } {}
(15)Once the phaseis determined across the interference field pixel by pixel on a two-dimensional CCD array, the local height distribution/contour, h(x, y), on the test surface is given by
h
(
x
,
y
)
=
λ
4π
ϕ
(
x
,
y
)
h
(
x
,
y
)
=
λ
4π
ϕ
(
x
,
y
)
size 12{h \( x,y \) = { {λ} over {4π} } ϕ \( x,y \) } {}
(16)Normally the resulted fringe can be in the form of a linear fringe pattern by adjusting the relative position between the reference mirror and sample surfaces. Hence any distorted interference fringe would indicate a local profile/contour of the test surface.
It is important to note that the Mireau objective is mounted on a capacitive closed-loop controlled PZT (piezoelectric actuator) as to enable phase shifting to be accurately implemented. The PZT is based on piezoelectric effect referred to the electric potential generated by applying pressure to piezoelectric material. This type of materials is used to convert electrical energy to mechanical energy and vice-versa. The precise motion that results when an electric potential is applied to a piezoelectric material has an importance for nanopositioning. Actuators using the piezo effect have been commercially available for 35 years and in that time have transformed the world of precision positioning and motion control.
Vertical scanning interferometer also has another name; white-light interferometry (WLI) because of using the white light as a source of light. With this type of source a separate fringe system is produced for each wavelength, and the resultant intensity at any point of examined surface is obtained by summing these individual patterns. Due to the broad bandwidth of the source the coherent length L of the source is short:
L
=
λ
2
nΔλ
L
=
λ
2
nΔλ
size 12{L= { {λ rSup { size 8{2} } } over {nΔλ} } } {}
(17)where λ is the center wavelength, n is the refractive index of the medium, ∆λ is the spectral width of the source. In this way good contrast fringes can be obtained only when the lengths of interfering beams pathways are closed to each other. If we will vary the length of a pathway of a beam reflected from sample, the height of a sample can be determined by looking at the position for which a fringe contrast is a maximum. In this case interference pattern exist only over a very shallow depth of the surface. When we vary a pathway of sample-reflected beam we also move the sample in a vertical direction in order to get the phase at which maximum intensity of fringes will be achieved. This phase will be converted in height of a point at the sample surface.
The combination of phase shift technology with white-light source provides a very powerful tool to measure the topography of quite rough surfaces with the amplitude in heights about and the precision up to 1-2 nm. Through a developed software package for quantitatively evaluating the resulting interferogram, the proposed system can retrieve the surface profile and topography of the sample objects Figure 5.