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About: Oxidation of Silicon

Module by: Andrew R. Barron. E-mail the author

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Name: Oxidation of Silicon
ID: m24908
Language: English (en)
Subject: Science and Technology
Keywords: chemical vapor deposition, conduction band, CVD, diffusion, dopant, high pressure, hydrogen, mask, MOSFET, oxidation, oxygen, plasma, semiconductor, silica, silicon, silicon dioxide, SiO2, steam, thermal, valence band, wafer, water
License: Creative Commons Attribution License CC-BY 3.0

Authors: Andrew R. Barron (
Copyright Holders: Andrew R. Barron (
Maintainers: Andrew R. Barron (

Latest version: 1.3 (history)
First publication date: May 27, 2009 7:28 am +0000
Last revision to module: Jan 20, 2010 3:23 pm +0000


PDF: m24908_1.3.pdf PDF file, for viewing content offline and printing. Learn more.
XML: m24908_1.3.cnxml XML that defines the structure and contents of the module, minus any included media files. Can be reimported in the editing interface. Learn more.

Version History

Version: 1.3 Jan 20, 2010 3:23 pm +0000 by Andrew R. Barron
reformat equations

Version: 1.2 Jul 13, 2009 4:07 pm +0000 by Andrew R. Barron
update meta data

Version: 1.1 Jun 10, 2009 8:49 am +0000 by Andrew R. Barron
1st version

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American Chemical Society (ACS) Style Guide:

Barron, A. Oxidation of Silicon, OpenStax-CNX Web site., Jan 20, 2010.

American Medical Assocation (AMA) Manual of Style:

Barron A. Oxidation of Silicon [OpenStax-CNX Web site]. January 20, 2010. Available at:

American Psychological Assocation (APA) Publication Manual:

Barron, A. (2010, January 20). Oxidation of Silicon. Retrieved from the OpenStax-CNX Web site:

Chicago Manual of Style (Bibliography):

Barron, Andrew. "Oxidation of Silicon." OpenStax-CNX. January 20, 2010.

Chicago Manual of Style (Note):

Andrew Barron, "Oxidation of Silicon," OpenStax-CNX, January 20, 2010,

Chicago Manual of Style (Reference, in Author-Date style):

Barron, A. 2010. Oxidation of Silicon. OpenStax-CNX, January 20, 2010.

Modern Languages Association (MLA) Style Manual:

Barron, Andrew. Oxidation of Silicon. OpenStax-CNX. 20 Jan. 2010 <>.