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About: Oxidation of Silicon

Module by: Andrew R. Barron. E-mail the author

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Name: Oxidation of Silicon
ID: m24908
Language: English (en)
Subject: Science and Technology
Keywords: chemical vapor deposition, conduction band, CVD, diffusion, dopant, high pressure, hydrogen, mask, MOSFET, oxidation, oxygen, plasma, semiconductor, silica, silicon, silicon dioxide, SiO2, steam, thermal, valence band, wafer, water
License: Creative Commons Attribution License CC-BY 3.0
Authors: Andrew R. Barron (arb@rice.edu)
Copyright Holders: Andrew R. Barron (arb@rice.edu)
Maintainers: Andrew R. Barron (arb@rice.edu)
Latest version: 1.3 (history)
First publication date: May 27, 2009 7:28 am -0500
Last revision to module: Jan 20, 2010 3:23 pm -0600

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Version History

Version: 1.3 Jan 20, 2010 3:23 pm -0600 by Andrew R. Barron
Changes: 
reformat equations
Version: 1.2 Jul 13, 2009 4:07 pm -0500 by Andrew R. Barron
Changes: 
update meta data
Version: 1.1 Jun 10, 2009 8:49 am -0500 by Andrew R. Barron
Changes: 
1st version

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  • the title of the work: Oxidation of Silicon
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How to Cite and Attribute This Content

The following citation styles comply with the attribution requirements for the license (CC-BY 3.0) of this work:

American Chemical Society (ACS) Style Guide:

Barron, A. Oxidation of Silicon, Connexions Web site. http://cnx.org/content/m24908/1.3/, Jan 20, 2010.

American Medical Assocation (AMA) Manual of Style:

Barron A. Oxidation of Silicon [Connexions Web site]. January 20, 2010. Available at: http://cnx.org/content/m24908/1.3/.

American Psychological Assocation (APA) Publication Manual:

Barron, A. (2010, January 20). Oxidation of Silicon. Retrieved from the Connexions Web site: http://cnx.org/content/m24908/1.3/

Chicago Manual of Style (Bibliography):

Barron, Andrew. "Oxidation of Silicon." Connexions. January 20, 2010. http://cnx.org/content/m24908/1.3/.

Chicago Manual of Style (Note):

Andrew Barron, "Oxidation of Silicon," Connexions, January 20, 2010, http://cnx.org/content/m24908/1.3/.

Chicago Manual of Style (Reference, in Author-Date style):

Barron, A. 2010. Oxidation of Silicon. Connexions, January 20, 2010. http://cnx.org/content/m24908/1.3/.

Modern Languages Association (MLA) Style Manual:

Barron, Andrew. Oxidation of Silicon. Connexions. 20 Jan. 2010 <http://cnx.org/content/m24908/1.3/>.