View the content: Oxidation of Silicon
|Name:||Oxidation of Silicon|
|Subject:||Science and Technology|
|Keywords:||chemical vapor deposition, conduction band, CVD, diffusion, dopant, high pressure, hydrogen, mask, MOSFET, oxidation, oxygen, plasma, semiconductor, silica, silicon, silicon dioxide, SiO2, steam, thermal, valence band, wafer, water|
|License:||Creative Commons Attribution License CC-BY 3.0|
|Authors:||Andrew R. Barron (email@example.com)|
|Copyright Holders:||Andrew R. Barron (firstname.lastname@example.org)|
|Maintainers:||Andrew R. Barron (email@example.com)|
|Latest version:||1.3 (history)|
|First publication date:||May 27, 2009 7:28 am +0000|
|Last revision to module:||Jan 20, 2010 3:23 pm +0000|
|PDF:||m24908_1.3.pdf||PDF file, for viewing content offline and printing. Learn more.|
|XML:||m24908_1.3.cnxml||XML that defines the structure and contents of the module, minus any included media files. Can be reimported in the editing interface. Learn more.|
|Version:||1.3 Jan 20, 2010 3:23 pm +0000 by Andrew R. Barron|
|Version:||1.2 Jul 13, 2009 4:07 pm +0000 by Andrew R. Barron|
update meta data
|Version:||1.1 Jun 10, 2009 8:49 am +0000 by Andrew R. Barron|
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Barron, A. Oxidation of Silicon, OpenStax-CNX Web site. http://cnx.org/content/m24908/1.3/, Jan 20, 2010.
Barron A. Oxidation of Silicon [OpenStax-CNX Web site]. January 20, 2010. Available at: http://cnx.org/content/m24908/1.3/.
Barron, A. (2010, January 20). Oxidation of Silicon. Retrieved from the OpenStax-CNX Web site: http://cnx.org/content/m24908/1.3/
Barron, Andrew. "Oxidation of Silicon." OpenStax-CNX. January 20, 2010. http://cnx.org/content/m24908/1.3/.
Andrew Barron, "Oxidation of Silicon," OpenStax-CNX, January 20, 2010, http://cnx.org/content/m24908/1.3/.
Barron, A. 2010. Oxidation of Silicon. OpenStax-CNX, January 20, 2010. http://cnx.org/content/m24908/1.3/.
Barron, Andrew. Oxidation of Silicon. OpenStax-CNX. 20 Jan. 2010 <http://cnx.org/content/m24908/1.3/>.