OpenStax CNX

Sections
You are here: Home » Content » Chemical Vapor Deposition of Alumina

About: Chemical Vapor Deposition of Alumina

Module by: Andrew R. Barron. E-mail the author

View the content: Chemical Vapor Deposition of Alumina

Metadata

Name: Chemical Vapor Deposition of Alumina
ID: m24918
Language: English (en)
Keywords: Al2O3, alumina, aluminum silicate, APCVD, chemical vapor deposition, corundum, CVD, epitaxial, hydrolysis, LPCVD, metal oxide, mullite, oxidation, oxygen, PECVD, phase diagram, plasma
License: Creative Commons Attribution License CC-BY 3.0

Authors: Andrew R. Barron (arb@rice.edu)
Copyright Holders: Andrew R. Barron (arb@rice.edu)
Maintainers: Andrew R. Barron (arb@rice.edu)

Latest version: 1.5 (history)
First publication date: Jun 10, 2009 9:04 am -0500
Last revision to module: Jan 25, 2010 4:45 pm -0600

Downloads

PDF: m24918_1.5.pdf PDF file, for viewing content offline and printing. Learn more.
XML: m24918_1.5.cnxml XML that defines the structure and contents of the module, minus any included media files. Can be reimported in the editing interface. Learn more.

Version History

Version: 1.5 Jan 25, 2010 4:45 pm -0600 by Andrew R. Barron
Changes:
change Eq size

Version: 1.4 Jan 7, 2010 10:26 am -0600 by Andrew R. Barron
Changes:
Equation format

Version: 1.3 Jul 13, 2009 6:57 pm -0500 by Andrew R. Barron
Changes:
update meta data

Version: 1.2 Jun 18, 2009 8:56 am -0500 by Andrew R. Barron
Changes:
change title

Version: 1.1 Jun 10, 2009 10:02 am -0500 by Andrew R. Barron
Changes:
1st version

How to Reuse and Attribute This Content

If you derive a copy of this content using a OpenStax-CNX account and publish your version, proper attribution of the original work will be automatically done for you.

If you reuse this work elsewhere, in order to comply with the attribution requirements of the license (CC-BY 3.0), you must include

  • the authors' names: Andrew Barron
  • the title of the work: Chemical Vapor Deposition of Alumina
  • the OpenStax-CNX URL where the work can be found: http://cnx.org/content/m24918/1.5/

See the citation section below for examples you can copy.

How to Cite and Attribute This Content

The following citation styles comply with the attribution requirements for the license (CC-BY 3.0) of this work:

American Chemical Society (ACS) Style Guide:

Barron, A. Chemical Vapor Deposition of Alumina, OpenStax-CNX Web site. http://cnx.org/content/m24918/1.5/, Jan 25, 2010.

American Medical Assocation (AMA) Manual of Style:

Barron A. Chemical Vapor Deposition of Alumina [OpenStax-CNX Web site]. January 25, 2010. Available at: http://cnx.org/content/m24918/1.5/.

American Psychological Assocation (APA) Publication Manual:

Barron, A. (2010, January 25). Chemical Vapor Deposition of Alumina. Retrieved from the OpenStax-CNX Web site: http://cnx.org/content/m24918/1.5/

Chicago Manual of Style (Bibliography):

Barron, Andrew. "Chemical Vapor Deposition of Alumina." OpenStax-CNX. January 25, 2010. http://cnx.org/content/m24918/1.5/.

Chicago Manual of Style (Note):

Andrew Barron, "Chemical Vapor Deposition of Alumina," OpenStax-CNX, January 25, 2010, http://cnx.org/content/m24918/1.5/.

Chicago Manual of Style (Reference, in Author-Date style):

Barron, A. 2010. Chemical Vapor Deposition of Alumina. OpenStax-CNX, January 25, 2010. http://cnx.org/content/m24918/1.5/.

Modern Languages Association (MLA) Style Manual:

Barron, Andrew. Chemical Vapor Deposition of Alumina. OpenStax-CNX. 25 Jan. 2010 <http://cnx.org/content/m24918/1.5/>.