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About: Chemical Vapor Deposition of Alumina

Module by: Andrew R. Barron. E-mail the author

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Metadata

Name: Chemical Vapor Deposition of Alumina
ID: m24918
Language: English (en)
Keywords: Al2O3, alumina, aluminum silicate, APCVD, chemical vapor deposition, corundum, CVD, epitaxial, hydrolysis, LPCVD, metal oxide, mullite, oxidation, oxygen, PECVD, phase diagram, plasma
License: Creative Commons Attribution License CC-BY 3.0
Authors: Andrew R. Barron (arb@rice.edu)
Copyright Holders: Andrew R. Barron (arb@rice.edu)
Maintainers: Andrew R. Barron (arb@rice.edu)
Latest version: 1.5 (history)
First publication date: Jun 10, 2009 9:04 am -0500
Last revision to module: Jan 25, 2010 4:45 pm -0600

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Version History

Version: 1.5 Jan 25, 2010 4:45 pm -0600 by Andrew R. Barron
Changes: 
change Eq size
Version: 1.4 Jan 7, 2010 10:26 am -0600 by Andrew R. Barron
Changes: 
Equation format
Version: 1.3 Jul 13, 2009 6:57 pm -0500 by Andrew R. Barron
Changes: 
update meta data
Version: 1.2 Jun 18, 2009 8:56 am -0500 by Andrew R. Barron
Changes: 
change title
Version: 1.1 Jun 10, 2009 10:02 am -0500 by Andrew R. Barron
Changes: 
1st version

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American Chemical Society (ACS) Style Guide:

Barron, A. Chemical Vapor Deposition of Alumina, Connexions Web site. http://cnx.org/content/m24918/1.5/, Jan 25, 2010.

American Medical Assocation (AMA) Manual of Style:

Barron A. Chemical Vapor Deposition of Alumina [Connexions Web site]. January 25, 2010. Available at: http://cnx.org/content/m24918/1.5/.

American Psychological Assocation (APA) Publication Manual:

Barron, A. (2010, January 25). Chemical Vapor Deposition of Alumina. Retrieved from the Connexions Web site: http://cnx.org/content/m24918/1.5/

Chicago Manual of Style (Bibliography):

Barron, Andrew. "Chemical Vapor Deposition of Alumina." Connexions. January 25, 2010. http://cnx.org/content/m24918/1.5/.

Chicago Manual of Style (Note):

Andrew Barron, "Chemical Vapor Deposition of Alumina," Connexions, January 25, 2010, http://cnx.org/content/m24918/1.5/.

Chicago Manual of Style (Reference, in Author-Date style):

Barron, A. 2010. Chemical Vapor Deposition of Alumina. Connexions, January 25, 2010. http://cnx.org/content/m24918/1.5/.

Modern Languages Association (MLA) Style Manual:

Barron, Andrew. Chemical Vapor Deposition of Alumina. Connexions. 25 Jan. 2010 <http://cnx.org/content/m24918/1.5/>.