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About: Optical Issues in Photolithography

Module by: Andrew R. Barron. E-mail the author

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Metadata

Name: Optical Issues in Photolithography
ID: m25448
Language: English (en)
Subject: Science and Technology
Keywords: critical dimension, etch, integrated circuit, laser, lithography, mask, pattern, photolithography, PMMA, polymer, refractive index, resist, semiconductor, UV, wash, X-ray
License: Creative Commons Attribution License CC-BY 3.0
Authors: Andrew R. Barron (arb@rice.edu)
Copyright Holders: Andrew R. Barron (arb@rice.edu)
Maintainers: Andrew R. Barron (arb@rice.edu)
Latest version: 1.4 (history)
First publication date: Jun 17, 2009 3:46 pm GMT-5
Last revision to module: Jul 13, 2009 5:19 pm GMT-5

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Version History

Version: 1.4 Jul 13, 2009 5:19 pm GMT-5 by Andrew R. Barron
Changes: 
update meta data
Version: 1.3 Jun 19, 2009 2:35 pm GMT-5 by Andrew R. Barron
Changes: 
check format
Version: 1.2 Jun 17, 2009 4:07 pm GMT-5 by Andrew R. Barron
Changes: 
change title
Version: 1.1 Jun 17, 2009 4:03 pm GMT-5 by Andrew R. Barron
Changes: 
1st version

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  • the authors' names: Andrew Barron
  • the title of the work: Optical Issues in Photolithography
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How to Cite and Attribute This Content

The following citation styles comply with the attribution requirements for the license (CC-BY 3.0) of this work:

American Chemical Society (ACS) Style Guide:

Barron, A. Optical Issues in Photolithography, Connexions Web site. http://cnx.org/content/m25448/1.4/, Jul 13, 2009.

American Medical Assocation (AMA) Manual of Style:

Barron A. Optical Issues in Photolithography [Connexions Web site]. July 13, 2009. Available at: http://cnx.org/content/m25448/1.4/.

American Psychological Assocation (APA) Publication Manual:

Barron, A. (2009, July 13). Optical Issues in Photolithography. Retrieved from the Connexions Web site: http://cnx.org/content/m25448/1.4/

Chicago Manual of Style (Bibliography):

Barron, Andrew. "Optical Issues in Photolithography." Connexions. July 13, 2009. http://cnx.org/content/m25448/1.4/.

Chicago Manual of Style (Note):

Andrew Barron, "Optical Issues in Photolithography," Connexions, July 13, 2009, http://cnx.org/content/m25448/1.4/.

Chicago Manual of Style (Reference, in Author-Date style):

Barron, A. 2009. Optical Issues in Photolithography. Connexions, July 13, 2009. http://cnx.org/content/m25448/1.4/.

Modern Languages Association (MLA) Style Manual:

Barron, Andrew. Optical Issues in Photolithography. Connexions. 13 July 2009 <http://cnx.org/content/m25448/1.4/>.