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Rutherford Backscattering of Thin Films (m22411)
Keywords: depth resolution, detection limit, EDX, He, helium, Nb, niobium, p-type, RBS, Rutherford, silicon, single stage accelerator, spectrum, stoichiometric ratio, tandem accelerator, thin film, XPS
Subject: Science and Technology
Language: English
Popularity: 86.35%
Revised: 2009-07-13
Revisions: 3
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