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Atomic Layer Deposition
(m25737)
Author:
Andrew R. Barron
Keywords:
ALD
,
ALE
,
amorphous
,
arsine
,
atomic layer deposition
,
atomic layer epitaxy
,
bond energy
,
chemical vapor deposition
,
chemisorb
,
crystal
,
CVD
,
GaAs
,
gallium
,
gallium arsenide
,
growth
,
laser
,
MOCVD
,
physisorbed
,
RHEED
,
semiconductor
,
superconductor
,
thin film
,
trimethylgallium
,
UPS
,
van der Waal
,
XPS
Subject:
Science and Technology
Language:
English
Popularity:
91.56%
Revised:
2009-07-13
Revisions:
2
Popularity is measured as percentile rank of page views/day over all time
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